Used Gencoa Planar Magnetron Cathode

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

MRC 943 Load Locked RF and DC Sputtering System with Substrate Heat and RF Etch. Fully Loaded System in great shape! Just had full PM Service by factory trained engineer. Video of operation available. Currently set up with 2 Planer cathodes and 1 Inset cathode. Large 5” x 15” Cathodes. CRT screen process monitoring. Substrate Carrier: 13” x 13”. Advanced Energy MDX10K DC Magnetron power supply and Advanced Energy RFX II 3000 RF generator.  Here is a link to a quick demonstration:  

https://youtu.be/jU8bNcUt2rs

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.