Vacuum Valves - Chambers - Systems

Was used for 200mm substrates. No turbo pump or other accessories. Only what is in photo.

Throttle Valve. Air operated. 100 mm conflat. 100 mm KF.

Variable Leak Valve. Controlled Leak Rate: 10^10 torr l/s. Vacuum Range: 10^11 torr (mbar). Entire valve bakeable to a max. of 450 deg C in either open or closed position.  2 Available.

KF16 Right Angle Valve. 24V. Never used, many available.

14.5 in. O.D. ISO Flange Throttle Valve. High speed motor delivers valve close to open in 0.3 secs. Highly corrosion resistant 316 stainless steel. Shutter type.

All Metal Right Angle Leak Valve. 2.75 in. OD conflat.

1-7/8 in. ID, 3-3/8 in. OD conflat flange. Air actuated.

120V, Air. KF50.

Air driven. KF50.

Right angle vacuum valve. KF 40.