Pumps: Vacuum

Dry Pump. Designed for clean processes load lock and transfer chamber pumping. Nominal Flow Rate: 50/60 Hz 1583 L/mn. Max. Pressure: 6.7 x 10-3 torr. Cooling Water: 60 L/h. Rotation Speed (Pump): 3000 to 3600 rpm. 200-480V, 3 Ph, 50/60 Hz, 6.2-3.2A, CE. Sold tested in good working condition, not rebuilt.

Oil-Free Dry Scroll Vacuum Pump. Tested and in good working condition, used pump. Max. Pumping Speed: 30 m3 per hour. 200-460V, 3 Ph, 50/60 Hz.

Dry Vacuum Pump. Alcatel 100L dry pump. For clean oil free pumping. Reduced volume and footprint. Advanced monitoring functions. Water cooled motor. AMAT interface. Peak Pumping Speed: 63 cfm. 208V, 3 Ph, 50/60 Hz, 12A, CE. Sold fully tested in good condition, not rebuilt.

Cryo Compressor. 460V, 3 Ph, 60 Hz.

Cryo Compressor. Water cooled. 480V, 3 Ph, 60 Hz.

Turbomolecular Drag Pump with Controller. 6-inch OD conflat flange. Pumping Speed: 210 l/s. 100-240V, 1 Ph, 50/60 Hz.

Centrifugal End Suction Pump. 3000rpm, 175 max. psi, 15 h.p. Very good condtion. 208-460V, 3 Ph, 50/60 Hz. 1510 BF 6.125.

Dry Pump Package. Provides very low cost of ownership and high reliability for clean light duty processes. Peak Speed: 353 cfm. Ultimate Vacuum: 1.5 x 10^-3. Inlet Flange: ISO100. 200-460V, 3 Ph, 50/60 Hz, CE. Does not include optional remote controller, requires external interface. In good working condition. Not rebuilt. Does not include power cord or water lines.

Peristaltic Pump. Analog console drive. Easy-Load II pump, uses tubing l/s 13, 14, 16, 25, 17, 18. Max. flow rate: 580 mL/min. Min. flow rate: 0.06 mL/min. 115V, 50/60 Hz, 2.3A.

Cryopump. 8 in. conflat flange. Cryo pump only, no compressor or cables. Pumping speed for air: 1000 l/s, water: 3600 l/s. Sold tested in good working condition, not rebuilt at this price.