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Sputtering Systems

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Used Gencoa Planar Magnetron Cathode

Inventory Number: 56694
Now (USD): $7,500.00

Gencoa Planar Magnetron Cathode. Target Area: 29-1/2 in. x 4-7/8 in. Gas input. With cart for maintenance of cathode.

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Used Gencoa Planar Magnetron Cathode

Inventory Number: 56692
Now (USD): $7,500.00

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Product Details

Used Gencoa Planar Magnetron Cathode

Inventory Number: 56693
Now (USD): Contact for Price

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Product Details

Used Denton Vacuum DV 602

Inventory Number: 63956
Now (USD): $19,500.00

Denton Vacuum DV-602 Single target RF Sputtering System.

Single 4" diameter RF magnetron sputtering cathode.

Rotating specimen holder with variable speed control.

Turbo pump and mechanical roughing pump with automatic or manual pump down controls.

500 Watt 13.56 MHZ RF generator with auto matching network.

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Used MRC 943

Inventory Number: 64193
Now (USD): $115,000.00

MRC 943 Load Locked RF and DC Sputtering System with Substrate Heat and RF Etch. Fully Loaded System in great shape! Just had full PM Service by factory trained engineer. Video of operation available. Currently set up with 2 Planer cathodes and 1 Inset cathode. Large 5” x 15” Cathodes. CRT screen process monitoring. Substrate Carrier: 13” x 13”. Advanced Energy MDX10K DC Magnetron power supply and Advanced Energy RFX II 3000 RF generator.  Here is a link to a quick demonstration:  

https://youtu.be/jU8bNcUt2rs

Product Details