Used Plasmatherm SLR 720/720

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SLR 720/720

Equipment Details

Inventory Number: 64538
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Plasmatherm

Plasmatherm SLR-720/720 Dual Chamber RIE Reactive Ion Etch System. PC controller with graphical user interface. Dual chamber unit with robot loader. Was lasted used to process 4" wafers. RF5S 500W, 13.56 MHz RF Generator. Comes with a Turbo pump but does not come with roughing pump. Currently confi gured with nine MFC. 208V, 3 Ph, 60 Hz. Sold as is where is untested at this price.

Now (USD): $35,000.00

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Product Details