Used Ulvac High Vacuum Chamber

Bid Service > Vacuum Valves - Chambers - Systems >

Equipment Photos

  • Ask Question
  • Email This
  • Similar Items
High Vacuum Chamber

Equipment Details

Inventory Number: 64265
Category: Vacuum Valves - Chambers - Systems
Manufacturer: Ulvac

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 30"H. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Multiple shutter actuators and feed throughs on bottom of chamber. Crystal sensors. Chamber in nice condition. Chamber sold as is not tested.

Now (USD): $8,500.00

Products Similar to: Ulvac High Vacuum Chamber

Used VAT Gate Valve

Inventory Number: 34961
Now (USD): $650.00

VAT Gate Valve. Stainless Steel MONVAT Series 02. Transfer valve for process systems. Double acting, pneumatic actuator. Air operated. ID: 8-1/4 in. x 2 in. Sealed bellows, solenoid, Viton. Pressure Range: 1.10^-9 mbar to 1.2 bar.

Product Details

Used Tylan General MDVX-160BS05

Inventory Number: 35016
Now (USD): $295.00

Tylan General MDVX-160BS05 Motor Driven Throttle Valve. No Controller. ISO-160 flange. 8-7/8 in. O.D.,6 in. I.D. 8 holes 7-7/8 in. on center.

Product Details

Used Balzers BVB 100 PX

Inventory Number: 37449
Now (USD): $295.00

Balzers BVB 100 PX Throttle Valve. Air operated. 100 mm conflat. 100 mm KF.

Product Details

Used VAT Rectangular Gate Valve

Inventory Number: 43716
Now (USD): $1,250.00

VAT Rectangular Gate Valve. 10 in. x 1 in. opening. 11 in. x 2-1/8 in. O-Ring. Air actuated.

Product Details

Used Millipore MDV-160B

Inventory Number: 46340
Now (USD): $295.00

Millipore MDV-160B Throttle Valve. 6 in. I.D. ISO flange. Valve only, no cable.

Product Details

Used Miscellaneous Right Angle Valve

Inventory Number: 49141
Now (USD): $100.00

Miscellaneous Right Angle Valve. 2-3/4 in. OD conflat flange. Air actuated.

Product Details

Used HPS Valve

Inventory Number: 49168
Now (USD): $100.00

HPS Valve. 1-7/8 in. ID, 3-3/8 in. OD conflat flange. Air actuated.

Product Details

Used Norcal 3870-01160

Inventory Number: 49510
Now (USD): $100.00

Norcal 3870-01160 Ion Tube Isolation Valve. KF-25 flange.

Product Details

Used Miscellaneous Throttle Valve

Inventory Number: 49680
Now (USD): $750.00

Miscellaneous Throttle Valve. From Applied Materials 8300 etcher. 9 in. OD, 6-1/4 in. ID, 8 in. bolt circle. Second Flange: 11 in. OD, 6 in. ID, 9-1/2 in. bolt circle.

Product Details

Used Leybold IPC-2

Inventory Number: 50000
Now (USD): $500.00

Leybold IPC-2 Pressure Converter Valve. Three position valve extends sampling pressure range. 2-3/4 in. O.D. conflat.

Product Details