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Equipment Details

Inventory Number: 57536
Category: Evaporators
Manufacturer: CHA

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

Now (USD): $45,000.00

Products Similar to: CHA SE-600-RAP

Used CHA SE-600

Inventory Number: 57550
Now (USD): $49,500.00

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Product Details

Used Kurt J. Lesker LXLT-42010

Inventory Number: 63924
Now (USD): $950.00

Kurt J Lesker LXLT-42010 Low Temperature Evaporation Source. LTE power supply and Thermal Evaporation Source. No cables.

8 AVAILABLE

Product Details

Used Denton Vacuum Infinity 18

Inventory Number: 64580
Now (USD): $59,000.00

Denton Infinity 18 Optical Coating Evaporator for Antireflective Coatings. Cryopumped high vacuum system that performs resistive evaporation of silicon monoxide (SiO, Silicon (II) Oxide) films to provide an antireflective coating for backside analysis. The system has an integrated optical monitor to measure the surface reflectance of a silicon witness coupon at a specific wavelength. Pumpdown of the vacuum system can be automatic or manual control, inniation and termination of the deposition cycle are manual. The vacuum, coating power, and optical monitor systems are operated from the touch screen controller panel. The deposition itself is operated from the Telemark 860 Depostion Controller panel. Chamber size 18" x 23" x 36" inside. Includes roughing pump and cryopump compressor. 208V, 3Ph, 50/60Hz, 70A

Product Details

Used Para Tech Labtop 3000

Inventory Number: 64770
Now (USD): $12,950.00

Para Tech LabTop 3000 Compact Bench Top Parylene Conformal Coating System. The compact LabTop by Para Tech is designed for coating small substrates and modules in laboratory, R&D and short run production settings. Its 8” by 9” stainless steel chamber can also accommodate larger devices for prototyping and research and development applications. Features the same automated process features and vacuum coating precision as full size Para Tech coating systems. Ideal for application development as well as short run production coating of printed circuit boards, medical components, electronic sensors and other small substrates. Tangential entry and exit of the polymerizing monomer results in an extremely low coating thickness gradient as well as superior film uniformity. Produces very thin Parylene film for optical applications and microwave components.  CE compliant.

Product Details

Used Specialty Coating Systems PDS 2010

Inventory Number: 64954
Now (USD): $17,950.00

Specialty Coating Systems PDS 2010 Parylene Coating System. Specialty Coating Systems portable parylene deposition system. Automatic operation, PLC control in auto mode the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When proper temperature and pressure are established the vaporizer begins parylene sublimation. 12” dia. x 12” H stainless steel chamber. Substrate rotation plate. Liquid nitrogen trap. 120V, 60 Hz, 20A, CE

Product Details

Used Denton Vacuum DV502A

Inventory Number: 64970
Now (USD): $12,000.00

Denton Vacuum DV-502A Dual Source High Vacuum Thermal Evaporator. Small compact laboratory sized thermal resistive deposition system. Can be configured with two wire basket type sources or a wire basket source and a carbon rod source. 1KVA transformers. Automatic pump down and vent controls. 12” diameter x 12” H bell jar with implosion guard. Turbo pump with roughing pump. Manual evaporation control. Built in vacuum gauges. 

Product Details

Used Temescal Ferrotec FC-2000

Inventory Number: 64981
Now (USD): $125,000.00

Temescal Ferrotec FC-2000 Ebeam Evaporator with Ion Gun Etch. The FC-2000 is a fast- cycle, load-locked system that allows the source to remain under vacuum during substrate reloading. The system is configured with a 6 pocket electron gun with a supersweep 64 sweep controller and the CV-6SLX 6KW E-gun power supply. The system also has a single resistive thermal deposition source. There is a 3-cm Ion source for etch or assisted deposition. Also includes the Inficon XTC/3S crystal deposition controller with dual crystal holder. System has a lift off dome for 4" wafers and variable speed substrate rotation.Standard source-to-substrate distance: 19.5″. The bell jar is 20" diameter. The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging. The TCS Automatic Mode. Auto mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics. The TCS Auto Mode also offers independent autopump and autovent operations, automated cryopump regeneration, and automated rate-of-rise testing. Manual Mode Operation. The TCS manual mode enables the user to set process parameters, operate major components and subsystems individually with full interlock protection, and execute nonautomated single-film deposition processes. Service Mode Operation. The TCS service mode provides noninterlocked low-level control over any of the system’s valves, pumps, motors, or power supplies. System Power 208V, 3Ph, 60Hz

Product Details

Used CHA SE-600

Inventory Number: 57550
Now (USD): $49,500.00

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Product Details