Ulvac

Ulvac Vacuum Chamber. Previously used to manufacture OLED devices. Chamber has two slotted openings on the sides where product was transferred in and out of glove box. Inside Dimensions: 19.75 in. x 21.5 in. D x 35.5 in. H. Stainless construction. Large full length front door.

Ulvac DIS-500 Oil Free Scroll Vacuum Pump. Nominal pumping speed 500 L/m. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable. Low vibration and noise. Maintenance cycle can be controlled by hour meter. 2305.6 hours on pump. 120V, 50/60 Hz 15A