Ulvac

Ulvac DIS-500 Oil Free Scroll Vacuum Pump. Nominal pumping speed 500 L/m. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable. Low vibration and noise. Maintenance cycle can be controlled by hour meter. 2305.6 hours on pump. 120V, 50/60 Hz 15A

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 30"H. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Multiple shutter actuators and feed throughs on bottom of chamber. Crystal sensors. Chamber in nice condition. Chamber sold as is not tested.