Used STI 270S

Inventory Number: 64134
Now (USD): $4,950.00

STI 270S Spin Rinse Dryer Batch Wafer Cleaning System. The SRD is a 25-wafer batch size single chamber tool. On axis orientation allows water to evenly spray the wafers. Clean, Rinse, Dry centrifugal drying coupled with heated filtered nitrogen. Currently configured with single bolt rotor for 4” wafers. Can process wafers up to 6" with different rotors needed for each size. Only one rotor with system. 120V, 50/60 Hz, 15A.

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