CHA

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.