Yield

YIELD YES 310 Dual Function Image Reversal or HMDS Vapor Prime Oven. Capacity for HMDS Prime: 8 cassettes of 4” wafers, or 1 cassette of 5-8” wafers. Capacity for Image Reversal: 4 cassettes of 4” wafers, or 1 cassette of 5-8” wafers. Cleanliness: <10x1 micron particles per 4” wafer. Throughput for HMDS Prime: 2 full loads/hr. Throughput for Image Reversal: (2) ½ loads/hr. Temperature: 250°C maximum. Does not include a vacuum pump at this price.

YIELD LP III-M5 Large Volume Vacuum Vapor Prime Oven. Microprocessor controller. Chamber Size: 16” x 16” x 16”. Holds eight 6” wafer cassettes. Throughput of 600 6” wafers per hour. Temperature 275°C maximum. Does not include a vacuum pump at this price.