Used Ulvac Large Vacuum Chamber

Inventory Number: 64267
Now (USD): $8,500.00

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 34"H. There are currently four deposition soucres wired inside the chamber. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Chamber sold as is not tested.

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Used Ulvac High Vacuum Elevator Chamber

Inventory Number: 64266
Now (USD): $6,500.00

Ulvac High Vacuum Elevator Chamber. Stainless steel Vacuum chamber with port on top for high vacuum pump- previously had a CTI 8F which was sold separately. Has a slot valve that was used to pass substrates in and out of the chamber. Sold as is not tested. In very good condition. Inside dimensions 19.5"W x 18.5"D x 48"H

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