Semiconductor Equipment Corporation

Semiconductor Equipment Corp 365 UV Tape Exposure System. Revolutionary new design cures UV tapes quickly and uniformly, features a long life light source and handles all size wafers up to 300mm. The Model 365 UV exposure system needs no external ventilation and has a small footprint.

Model 365 Capabilities:

• Cures most UV tape in 5 seconds
• Large exposure area cures up to 300mm wafers.
• Film Frame masks available.
• Programmable N₂ purge and cure time
• Touch screen control
• Safety interlock to prevent operator exposure to UV light
• Self diagnostic (alarm if LED fails, identifies faulty LED module)
• 10,000 hour LED life
• Generates no ozone
• Cooling fans temperature controlled

Specifications:

• 70mW per sq. centimeter @ 365nM wavelength
• 21.5” wide X 31.5” long X 5.5” high
• Weight: 55 pounds
• Power: 115 VAC; 3.5 amp; 50/60 Hz
• Cover gas: N₂ 20 psi @ 0.5 CFM