Jipelec

Jipelec SiC Furnace High Temperature Batch Furnace. Designed to provide high temperature uniformity and long process capability. Temp. Range: 700 deg C to 2000 deg C. Ramp Rate: Up to 15 deg C/s. Pyrometer Control: 500 deg C to 2000 deg C. For small substrates up to 2 in. dia. Can be used with vacuum pump, not included. 208V, 3 Ph, 60 Hz, 67A, CE.

Jipelec JetFirst 150 Rapid Thermal Processing System with Vacuum Chamber. PC controller. Temperature measurement control system provides accurate and repeatable thermal control across the temperature range. Temperatures up to 1300 deg C. Multi-zone halogen lamp furnace. Ramp Rate: 1 deg C/s to 400 deg C/s. Max. Substrate Size: 6 in. dia. Process gas lines. Includes roughing pump. 220V, 3 Ph, 50/60 Hz, 100A, CE. Unit will be tested for an accuracy of +/-5 deg C from setpoint.