Jipelec

High Temperature Batch Furnace. Designed to provide high temperature uniformity and long process capability. Temp. Range: 700 deg C to 2000 deg C. Ramp Rate: Up to 15 deg C/s. Pyrometer Control: 500 deg C to 2000 deg C. For small substrates up to 2 in. dia. Can be used with vacuum pump, not included. 208V, 3 Ph, 60 Hz, 67A, CE.

Rapid Thermal Processing System with Vacuum Chamber. PC controller. Temperature measurement control system provides accurate and repeatable thermal control across the temperature range. Temperatures up to 1300 deg C. Multi-zone halogen lamp furnace. Ramp Rate: 1 deg C/s to 400 deg C/s. Max. Substrate Size: 6 in. dia. Process gas lines. Includes roughing pump. 220V, 3 Ph, 50/60 Hz, 100A, CE. Unit will be tested for an accuracy of +/-5 deg C from setpoint.