Used ENI RFC-4T

Inventory Number: 34998
Now (USD): $1,250.00

ENI RFC-4T Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

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Used ENI RFC-2000

Inventory Number: 34906
Now (USD): $1,250.00

ENI RFC-2000 Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

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Used ENI DCG-200Z

Inventory Number: 43991
Now (USD): $1,950.00

ENI DCG-200Z Reactive Sputtering Power Supply. For reactive sputtering processes in which arcing is unavoidable, the low level arc energy and high arc sensitivity have important benefits. System output 20 kW. 380/480V, 3 Ph, 50/60 Hz.

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Used ENI Polara-260A

Inventory Number: 53297
Now (USD): $1,250.00

ENI Polara-260A Pulsed Bipolar Power Supply. Power: 3 kW. P/N 260-01. Customer Part No.: 0190-01428. 208V, 3 Ph, 50/60 Hz, 30A, CE.

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Used ENI Polara-260A

Inventory Number: 53301
Now (USD): $1,250.00

ENI Polara-260A Pulsed Bipolar Power Supply for Semiconductor Electroplating Applications. Power: 3 kW. Software modified Ver. 1.2 Test A. 208V, 3 Ph, 50/60 Hz, 30A.

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Used ENI VL-400 M2

Inventory Number: 53848
Now (USD): $1,250.00

ENI VL-400 M2 Phase Shift Controller. Designed for use with OEM or ACG Series plasma generators. Provides additional flexibility for controlling RF power in plasma etching and sputtering applications at 13.56 MHz. The VL-400 is capable of producing up to three fixed-phase 13.56 MHz outputs and one additional phase shifted output. The phase shifted output can be varied from 0 to 500 degrees with respect to the fixed phase outputs.

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Used ENI LPG-1A-000-51

Inventory Number: 55603
Now (USD): $1,250.00

ENI LPG-1A-000-51 100 KHz 50W RF Generator. 50W RF output. Operating Frequency: 100 KHz. Water cooled. 208V, 1 Ph, 60 Hz.

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Used ENI OEM-12A-6

Inventory Number: 57452
Now (USD): $1,950.00

ENI OEM-12A-6 1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

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Used ENI OEM-12J

Inventory Number: 57465
Now (USD): $1,950.00

ENI OEM-12J 1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

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Used ENI OEM-50N-11601

Inventory Number: 60286
Now (USD): $2,950.00

ENI OEM-50N-11601 13.56 MHz 5000W RF Plasma Generator. Previously used for Novellus system. Solid state rugged RF generator. Automatic forward power leveling. Pulsed operation. Output Frequency: 13.56 MHz with a maximum 5000W. Water cooled. 208V, 3 Ph, 50/60 Hz, 40A.

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