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Used Allwin21 Accuthermo AW810M

Inventory Number: 64213
Now (USD): $49,000.00

Allwin21 Accuthermo AW810M Rapid Thermal Processing Furnace RTP. The AccuThermo AW810 is a rapid thermal processing (RTP) system, which uses high intensity visible radiation to heat single wafers for short process periods of time at precisely controlled temperatures. The process periods are typically 1‑600 seconds in duration, although periods of up to 9999 seconds can be selected. The RTAPRO control software allows full control and diagnostics of the AccuThermo RTP system.  In addition, it allows the creation of recipes for automated control of the temperature and, optionally, process gas flow. High-intensity visible radiation heats wafers for short periods of 1 to 9999 seconds at precisely controlled temperatures in the 100°C to 800°C range. (1 to 600 second heating periods are used typically.) This unit only uses the thermocouple temperature control and does not have the optional pyrometer for higher temperature operations up to 1200° C. The system has four process gas inputs. The unit can accommodate substrates up to 8" diameter. Ramp up rate:  Programmable, 10°C to 120°C per second. 208V, 3Ph, 60Hz, 100A

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