Wafer Analysis

Automated Defect Inspection System. Inspection of whole wafers, sawn wafers, JEDEC trays, Auer boats, die in gel/waffle paks, MCM’s. Detects defects down to 0.5 micron. Automated wafer mapping and identification. Automated data collection and reporting. Menu-based, easy to use Windows environment. 200-240V, 1 Ph, 50/60 Hz, 5A, CE.

Precision Stylus Profiler. Bruker’s DektakXT™ Stylus Profiler features a revolutionary design that enables 4 angstrom repeatability. Unmatched performance. 4 angstrom repeatability delivers industry leading accuracy. Single-arch design provides breakthrough scan stability. Leading-edge smart electronics establish new low noise benchmark. New hardware configuration offers 40 percent faster data collection times than prior generations. Unprecedented efficiency and ease of use. Intuitive Vision64™ user interface workflow simplifies operation. Self-aligning styli enables effortless tip exchange. Single sensor design offers low force and extended range in a single platform. System has these options currently installed: Automation, DTX Stitching, DTX 3D Mapping and DTX N Light.

Measurement Technique: Stylus profilometry (contact measurement).
Measurement Capability: Two-dimensional surface profile measurements.
Sample Viewing: Digital magnification, 0.275 to 2.2 mm vertical FOV.
Stylus Force: 1 to 15 mg with LIS 3 sensor.
Low Force Option: N-Lite+ Low Force with 0.03 to 15 mg (optional).
Sample X/Y Stage: Motorized 150 mm (6 in.) X/Y, manual leveling.
Scan Length Range: 55 mm (2 in.).
Max. Sample Thickness: 50 mm (1.95 in.).
Step Height Repeatability: 4 angstrom, 1 sigma on steps less than or equal to 1 micrometer (30 scans using a 12.5 micrometers stylus).
Vertical Range: 1 mm (0.039 in.).
Vertical Resolution: 1 angstrom (at 6.55 micrometers range).
100-240V, 50/60 Hz, CE.
Date of Mfg.: 7/2011. Very nice condition.

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR CDE SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Four Point Probe Resistivity Measurement System. Four point probe system for mapping resistivity on substrates from 2 in. to 8 in. dia. Manual loading of subtrates. Measurement Range: 2 milliohms/sq. to 5 megaohms/sq. Polar maps, rectangular maps, line scan or user defined patterns. 115/230V, 60 Hz.

Large Substrate Resistivity Mapping System. Designed to meet the needs of 300 mm process development and large substrate film characterization. Can handle wafers from 2 in. to 12 in. dia. and square substrates up to 8.6 in. x 8.6 in. Polar maps, rectangular maps, line scan or user defined scans. 120V, 60 Hz, CE.

Non-Contact Profile Measurement System. Uses laser triangulation to analyze two dimensional data. Non-contact measurement allows you to work with wet and fragile samples. PC controller analyzes data. Motorized stage. 120V, 60 Hz.

Fluorescent X-Ray Measurement System. X-Y Stage: 3 in. x 3 in. Travel Z. Adjustment: 1.3 in. Min. Measurement area: .005 in. Sold AS IS.

Multiwavelength 200mm Ellipsometer. Has a software disk but no cables or controls. Missing computer and stage driver. Two wavelength ellipsometers use additional laser sources to analyze difficult films. 8 in. dia. stage with motorized stage, no controller. Sold As Is with 30 day ROR.

Simple Manual Ellipsometer. Manual stage. Missing computer. Reliable HeNe laser source. Small 15 micron measuring spot. 115V, 50/60 Hz.

Non-Contact Automatic 3-Axis Tabletop Measurement System. JMAR Video CMM® software. Supports high magnification microscope optics. Three channel computer controlled light source. X-Y stage travel: 10 in. x 4 in. 115V, 60 Hz. Mfg. 2001.

SOLD AS IS. UNIT DOES NOT HAVE A PC. PARTS NOT WORKING.

Surface Profiler. Unit does not have a PC. The P-6 surface profiler features an unprecedented range of features and capabilities in a mid-range general purpose instrument. A variety of options are available to enhance the capabilities of the standard system. Stylus Profiling: The precision scan stage design enables high quality scans over the entire 6 in. sample stage area with up to 150 mm scan length and 1 mm Z range. This design ensures the highest quality 2D scans resulting in a higher level of metrology quality. Step Height Repeatability: A step height repeatability of 6 angstrom or 0.1 percent (1s ), a noise floor below 1nm RMS as measured on the scan stage, and a sub-Angstrom resolution capacitance sensor translates into the most repeatable, and sensitive ultra-thin film step measurements,roughness/waviness measurements and accurate curvature reproduction. Parts not working.