Wafer Analysis

August Technology NSX-85 Automated Defect Inspection System. Inspection of whole wafers, sawn wafers, JEDEC trays, Auer boats, die in gel/waffle paks, MCM’s. Detects defects down to 0.5 micron. Automated wafer mapping and identification. Automated data collection and reporting. Menu-based, easy to use Windows environment. 200-240V, 1 Ph, 50/60 Hz, 5A, CE. Sold As Is.

CDE Resmap 178 Four Point Probe Resistivity Mapping System. Designed to meet the needs of process development and tool characterization engineers, this four point probe has the accuracy, repeatability and reliability required. Wafer Size: 2” to 8” manual load. Typical Measurement Time: 1 sec. per site. Mapping Patterns: Polar map (align with notch/flat; rectangular map (choose inside edge exclusion); line scan (diameter, radius or any point to point diameter, minimum step 0.1mm); user defined (template). Measurement Range: 2 milliohms per sq. to 5 megaohms per sq. (can be optimized to 1 milliohm per sq.).

Cyberoptics Cyberscan 200 Non-Contact Profile Measurement System. Uses laser triangulation to analyze two dimensional data. Non-contact measurement allows you to work with wet and fragile samples. PC controller analyzes data. Motorized stage. 120V, 60 Hz.

FSM 128/500TC Lot of Film Stress Measurement Tools. Repairs needed.

Gaertner L2W16D.830 Multiwavelength 200mm Ellipsometer. Has a software disk but no cables or controls. Missing computer and stage driver. Two wavelength ellipsometers use additional laser sources to analyze difficult films. 8 in. dia. stage with motorized stage, no controller. Sold As Is with 30 day ROR.

Gaertner L-26 Simple Manual Ellipsometer. Manual stage. Missing computer. Reliable HeNe laser source. Small 15 micron measuring spot. 115V, 50/60 Hz.

JMar S2610-01 Non-Contact Automatic 3 Axis Tabletop Measurement System JMAR Video CMM® software. Supports high magnification microscope optics. 3 channel computer controlled light source. X-Y stage travel: 10” x 4”. 115V, 60 Hz. Mfg. 2001.

KLA Tencor P-6 Surface Profiler. Unit does not have a PC. The P-6 surface profiler features an unprecedented range of features and capabilities in a mid-range general purpose instrument. A variety of options are available to enhance the capabilities of the standard system. Stylus Profiling: The precision scan stage design enables high quality scans over the entire 6 in. sample stage area with up to 150 mm scan length and 1 mm Z range. This design ensures the highest quality 2D scans resulting in a higher level of metrology quality. Step Height Repeatability: A step height repeatability of 6 angstrom or 0.1 percent (1s ), a noise floor below 1nm RMS as measured on the scan stage, and a sub-Angstrom resolution capacitance sensor translates into the most repeatable, and sensitive ultra-thin film step measurements,roughness/waviness measurements and accurate curvature reproduction. Sold As Is. Unit does not have a PC. Parts not working.

KLA/Tencor D-500 Stylus Profiler. The D-500 stylus profilers provide a wide range of application specific capabilities, meeting the needs of the research, engineering, and production communities. Stylus Profiling: The 140 mm sample stage supports scan lengths up to 30 mm in a single scan. The D-500 provides the highest vertical range at 1200µm and low force sensor technology at 0.03 mg, ensuring scan precision on an array of applications, including thin films, soft materials, tall steps. The D-500 features advanced optics that includes a high resolution 5 MP color camera with 4x digital zoom and enhanced lighting controls. Step Height Repeatability: A sub-Angstrom resolution, optical lever sensor translates into the most repeatable low mass, low noise sensor design. This enables step height repeatability of 5 Å on a 1µm step for demanding process needs.

Kruss FM40 EasyDrop Contact Angle Measuring System. Computer controlled dosing. Regulable illumination. Digital image allows perfect drop shape analysis. Accuracy: +/- 0.1 degrees. 100-240V, 47-63 Hz, CE.