Modular Process Tech

Modular Process Technology RTP-600S Rapid Thermal Processing System. (AG ASSOCIATES)The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6”. Temp. Range: 250°C to 1300°C. Quartz chamber. Up to six channels of MFC control. ( ONLY TWO GAS INPUTS) Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A.