Used Varian VHS-4

Varian VHS-4 High Speed Diffusion Pump. Pumping Speed: 1200 l/s. Inlet Flange: 9 in. OD, 5.9 in. ID. Water cooled. 240V, 1 Ph, 60 Hz.

Varian VHS-4 High Speed Diffusion Pump. Pumping Speed: 1200 l/s. ASA Type Flange: 9 in. OD, 5.9 in. ID. Water cooled. 120V, 50/60 Hz.

Shimadzu E1-2003M1 Turbopump Controller. Controller only, no cables.  5 Available.

Ebara 50X20 Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Condition Uknown

Ebara 50X20 Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A.  Condition Unknown.

Ebara A150W-M High Volume Vacuum Dry Pump Package. Control panel for monitoring condition. High reliability even for harsh processes. Pumping Speed: 18,000 l/min. Water cooled. Manifold coolers. Inlet Flange: 4 in. ISO. 200/220V, 3 Ph, 50/60 Hz, 36.1A, CE.  Does not come with power cord or water lines. Condition Unknown.

Varian VHS-4 High Speed Diffusion Pump. Pumping Speed: 1200 l/s. Inlet Flange: 9 in. OD, 5.9 in. ID. Water cooled. 240V, 1 Ph, 60 Hz.

Osaka Vacuum TG-1810 Turbo Pump. Pump only, no controller. Volume Flow Rate: 1800 l/s. 10 in. ID ISO flange.

Millipore WCDSF16L1 Photoresist Pump. Pump only.

Millipore WCDS216L1 Photoresist Pump.