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Equipment Details

Inventory Number: 63932
Category: Vacuum Valves - Chambers - Systems
Manufacturer: Kurt J. Lesker

Kurt J Lesker Vacuum Deposition Chamber. Chamber was removed from a cluster tool that was used to make OLED parts. 18" diameter chamber by 39" high. Substrate rotation feed through and motor. 9.5" ISO Flange. Five 2.75" Conflat viewports. Thirty 1" feed throughs in door. 8" diameter CF flange on back and 2.75" CF. Four 2.75" CF and one 4.5" CF on lid.

Now (USD): $3,950.00

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