Used Temescal FC-1800

Temescal FC-1800 E-Beam Thin Film Evaporator with Substrate Heaters and Deposition Rate Controller. Used thin film deposition system. System has a load lock for fast cycling or wafers. Water cooled stainless steel bell jar. Currently configured with lift-off dome for 4 in. dia. wafers. Quartz substrate heaters. Automatic or manual valve controls. Crystal film thickness monitor. CV-8 8 kW e-beam power supply with sweep controller. 4 pocket e-gun with pocket selector. Cryopump. Special Price.

Temescal FC-1800 Single Pocket E-Beam Evaporator. Load Lock between source chamber and product. Easy access chamber with spring loaded hinged lid for easy substrate loading. Automatic or manual valve sequencing. All controls are within easy reach. CTI On Board cryopump with compressor. Sima E-Beam power supply with sweep and power controls. Inficon crystal deposition monitor for measuring deposition rates.  Sold As Is Untested Price: $25,000. Refurbished Price: $59,000.

Unaxis BAK EVO (760) Multiple Source Thermal Evaporator. Used thin film deposition system. Proven modular design box coater system can be easily configured for many applications. Currently configured with 3 shutters and 8 water cooled power feed throughs. 3 Inficon XTC crystal deposition monitors each controlled via Khan computer. Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics. Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built in failure diagnostics. CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down. Mfg. 2001. Very low hours. Sold As Is.

Temescal BJD-1800 Electron Beam Evaporator. Used thin film deposition system. Maxtek crystal deposition rate monitor. Four pocket E-Gun. CV-14 E Beam power supply with sweep controls. Vacuum gauges. CTI cryopump with compressor. Does not have substrate heaters. Needs Hinge.

CHA SEC-1000-RAP Dual Gun E Beam Evaporator. Used thin film deposition system. Two single pocket e-guns with individual power and sweep control. Inficon IC4 Plus deposition rate monitor. Temescal CV-8 E beam power supply. Auto-Tech II valve controller.  25.5 in. diameter water cooled stainless steel bell jar. CTI cryopump with compressor. Does not have substrate fixturing currently.

CHA SE-1000-RAP Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply needs tube. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.

CHA Bell Jar. Stainless steel. 25.75 in. OD, 29 in. tall.

CHA SE-1000 E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

Temescal VES-2550 E-Beam Evaporation System with Two Four Pocket E-Guns. Used thin film deposition system dual egun evaporator. Inficon IC4 crystal deposition monitor. Two four pocket electron guns with rotation controller. Temescal CV-8 E-Beam power supply. Currently configured with single fixed dome for 3 in. substrates (see photo). Water cooled 25 in. ID chamber. Automatic or manual valve control. CTI cryopump with compressor.

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.