Equipment Photos

Equipment Details

Inventory Number: 36278
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Tegal

Inline Plasma Etcher. Fully automatic, microprocessor-based, plasma chemistry etcher designed especially for the etching of thin films deposited on semiconductor wafers. All gas flow rates controlled by mass flow controllers. Sold As Is. Does not come with monitor or RF generator.

Now (USD): $750.00

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Product Details

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Product Details


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Product Details

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Product Details

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THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR PLASMA THERM SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Reactive Ion Etcher. Computer controlled plasma processing tool. Substrate electrode 7 in. dia. holds a 6 in. wafer. Shower head gas introduction. 500W, 13.56 MHz RF generator. Turbo pumped vacuum system. Includes roughing pump. 7 gas inputs controlled via MFC. 208V, 3 Ph, 60 Hz.

Product Details