Equipment Photos

Equipment Details

Inventory Number: 61325
Category: Photoresist: Coaters - Tracks
Manufacturer: Headway Research

Photoresist Spinner Mounted in Exhaust Hood Table. Spin coater for substrates up to 5 in. diameter or diagonal. The bowl diameter is 7.9 in. ID. Up to 10,000 rpm for relatively light loads such as silicon wafers or small photomasks. Two HDP98 pump fluid dispensers included at no additional price but these are not tested or part of warranty. PWM32 digital controller. Unit is mounted on a table with a stainless fume hood. 120V, 50/60 Hz, 10A.

Now (USD): $5,250.00

Products Similar to: Headway Research PWM32-R790

Used Ultrasonic Systems P450-1-151

Inventory Number: 57083
Now (USD): $25,000.00

Selective Coating System. Programmable selective coating system for precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray technology which enables more accurate, thinner coating applications than conventional spray and dispensing technology. Currently configured with CAT ILDS head. Conveyor system. Graphical user interface. 115V, 50/60 Hz, 13A, CE.

Product Details

Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42576
Now (USD): $32,000.00

Extrusion Coating System. Uses high precision extrusion technology to coat materials in a wide range of viscosities. Coats very thick layers (100 micrometers) in a single step. Repeatable digitally programmed process. Greater material utilization than spin coating (typical 75 percent of dispensed material remains on the wafer).

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42901
Now (USD): $39,000.00

Cassette to Cassette Extrusion Coating System with Stacked Bake/Chill Oven. System is capable of coatings over 100 micron thick in one process step with uniformities surpassing +/- 2 percent. Material utilization is 75 percent compared to 5-10 percent for spin coating. This means lower cost of material and reduced expense of waste disposal. Increased process uniformity. Uses high precision extrusion technology. Ability to coat materials in a wide range of viscosities. Repeatable digitally programmed process. With Genmark Mini Max Gencobot 7S/3L Handler. Model JS-9940 stacked bake unit with 3 ovens.

Product Details

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used Thermo Oriel Accudose 9000

Inventory Number: 53217
Now (USD): $12,500.00

Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

Product Details

Used Ultrasonic Systems P450

Inventory Number: 57148
Now (USD): $29,500.00

Selective Coating System. Programmable selective coating system for the precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray ultrasonic coating head which enables accurate thinner coating application than conventional spray and dispensing technology. Currently configured with Ultra-Spray CAT 35 ILDS head. Cartridge dispense system. Conveyor system. Graphical user interface. 120V, 50/60 Hz, 13A.

Product Details

Used IVI Corp. Box Coater

Inventory Number: 57766
Now (USD): $16,000.00

PC controller. Crystal deposition rate controller. Heater power supply, quartz lamps inside. Resistance power supply. Inside Dimensions: 27 in. L x 27 in. D x 30 in. H. System does not have cryo or roughing pumps. Sold As Is, not complete.

Product Details

Used Headway Research CB-15

Inventory Number: 55891
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR HEADWAY RESEARCH SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Photoresist Spinner. Capable of spinning up to 9 in. dia. substrates. EC101-D controller. 15 in. dia. bowl. RPM Range: 50 to 10,000. Acceleration: 0.25 sec. to 1.25 sec. 115V, 50/60 Hz, 3A.

Product Details

Used Laurell Spinner

Inventory Number: 55123
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR LAURELL SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Digital readouts. Manual controls. Max. Speed: 2400 rpm. No load. 12 in. dia. bowl. Custom top cover. 115V, 60 Hz.

Product Details