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Equipment Details

Inventory Number: 60465
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Ulvac

Ulvac Phoenix Enviro I Single Chamber Multiple Step RF & Microwave Plasma Asher. Production proven resist strip and residue cleaning solution. 120/208V, 3 Ph, 50/60 Hz, 42A. Came out of working environment but did not see it running. Can be set up and fully tested at additional cost. Sold As Is.

Now (USD): $35,000.00

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Used March Instruments PX 1000E8

Inventory Number: 58786
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March Instruments PX 1000E8 Plasma Asher/Etcher with Pneumatic Vertical Door. Batch system for plasma cleaning or etching. Currently configured with one shelf set: 17 in. x 14 in. Can accommodate multiple shelves. RFX 600 13.56 MHz RF generator. Two gas inputs. Does not include vacuum pump at this price, additional cost depending on type required.

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Product Details

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Inventory Number: 62871
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Product Details

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Inventory Number: 62243
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Product Details

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Inventory Number: 63473
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Product Details