Used Sunic Systems OLED Vacuum Deposition Chamber

Sunic Systems OLED Vacuum Deposition Chamber. Chamber came from a cluster tool that was producing OLED devices. This chamber was designated Organic Chamber. There are 10 deposition sources in the chamber. The chamber also includes an Ulvac Cryopump and compressor. The inside dimensions are 25"W x 29"D x 27"H. Chamber is being sold as is where is, we cannot test this item.

VAT Gate Valve. Stainless Steel MONVAT Series 02. Transfer valve for process systems. Double acting, pneumatic actuator. Air operated. ID: 8-1/4 in. x 2 in. Sealed bellows, solenoid, Viton. Pressure Range: 1.10^-9 mbar to 1.2 bar.

Tylan General MDVX-160BS05 Motor Driven Throttle Valve. No Controller. ISO-160 flange. 8-7/8 in. O.D.,6 in. I.D. 8 holes 7-7/8 in. on center.

Balzers BVB 100 PX Throttle Valve. Air operated. 100 mm conflat. 100 mm KF.

VAT Rectangular Gate Valve. 10 in. x 1 in. opening. 11 in. x 2-1/8 in. O-Ring. Air actuated.

Millipore MDV-160B Throttle Valve. 6 in. I.D. ISO flange. Valve only, no cable.

Miscellaneous Right Angle Valve. 2-3/4 in. OD conflat flange. Air actuated.

HPS Valve. 1-7/8 in. ID, 3-3/8 in. OD conflat flange. Air actuated.

Norcal 3870-01160 Ion Tube Isolation Valve. KF-25 flange.

Miscellaneous Throttle Valve. From Applied Materials 8300 etcher. 9 in. OD, 6-1/4 in. ID, 8 in. bolt circle. Second Flange: 11 in. OD, 6 in. ID, 9-1/2 in. bolt circle.