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Equipment Details

Inventory Number: 60286
Category: Power Supplies - RF-Plasma-E-Gun
Manufacturer: ENI

ENI OEM-50N-11601 13.56 MHz 5000W RF Plasma Generator. Previously used for Novellus system. Solid state rugged RF generator. Automatic forward power leveling. Pulsed operation. Output Frequency: 13.56 MHz with a maximum 5000W. Water cooled. 208V, 3 Ph, 50/60 Hz, 40A.

Now (USD): $2,950.00

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