Used Karl Suss MJB3-IR

Tamarack 152R 1000-9 Mask Alignment and Exposure System. Split field alignment with twin video cameras equipped with zoom lenses. Controlled collimation exposures. Nitrogen purge. Proximity printing. Soft contact control. Currently configured with 3-3/8 in. x 3-3/8 in. vacuum chuck and 5 in. mask. Other sizes can be purchased from manufacturer. 500/1000W UV light source. 115V, 60 Hz.

Tamarack 152P/162 Projection Mask Aligner. For thin film alignment and expose on ceramic, silicon, metal or glass substrates with diagonals or diameters of up to 6 in. Through-the-lens alignment. 4 to 8 mils depth of focus. 1:1 projection. 1000W lamp maximum. Wavelength Range: 350 to 450nm. Resolution: 15 to 25 microns. No lamp power supply.

Thermo Oriel Accudose 9000 Photospeed Tool. Measures batch to batch photospeed variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

Karl Suss MJB3 Standard Mask Aligner. System capable of exposing partial wafers or substrates up to a maximum size of 3 in. dia. Ask salesperson about available chucks and sizes. Hard or soft contact modes. 365nm to 400nm spectrum of a 200W high pressure arc lamp. Alignment optics consist of normal field microscope with objective turret for different magnifications. 110V, 60 Hz.

Honle UVASPOT 400T High Powered Ultra-Violet UV Curing System. The UVASPOT 400T is used in laboratories and in production processes in widely varying sectors of industry for: Hardening UV reactive polyester resins and casting masses (e.g. tanks, containers, pipes and plastic parts). Testing UV resistance of paints, varnishes, textiles and coatings. Fluorescence testing. Hardening UV reactive adhesives (bonding glass, plastic, metal as well as electronic, precision mechanical and optical components). UV radiation in chemical, biological and pharmaceutical research and production. Coating PC boards. Custom cabinet with pull-out tray: 21 in. x 23 in. 230V, 50 Hz, CE.

Honle UVASPOT 400T High Powered Ultra-Violet UV Curing System. The UVASPOT 400T is used in laboratories and in production processes in widely varying sectors of industry for: Hardening UV reactive polyester resins and casting masses (e.g. tanks, containers, pipes and plastic parts). Testing UV resistance of paints, varnishes, textiles and coatings. Fluorescence testing. Hardening UV reactive adhesives (bonding glass, plastic, metal as well as electronic, precision mechanical and optical components). UV radiation in chemical, biological and pharmaceutical research and production. Coating PC boards. Custom cabinet with pull-out tray: 21 in. x 23 in. 230V, 50 Hz, CE.

Karl Suss MJB3 Precision High Performance Mask Alignment and Exposure System. Easy to use manual mask aligner. System capable of exposing partial wafers or substrates up to a maximum size of 3 in. dia. (Ask a salesperson about available mask and chuck sizes). Hard or soft contact modes. High precision alignment stage X,Y, Theta. 365 to 400nm spectral range up to 350W. 110V, 60 Hz.

Karl Suss MJB3 Mask Aligner. Has backside capability but no IR chuck with unit. Working condition unknown. Sold As Is.

OAI Hybralign 400 Large Area Mask Aligner and Exposure System. Combines a precision mask to substrate alignment stage with a uniform, high intensity UV lightsource. System is very versatile. Splitfield microscope. UV power supply and exposure timer. 365/400 nm optics with a final lense diameter of 10 in.  115V, 50/60 Hz.

Karl Suss MJB3 Research Mask Aligner. Mask aligner with vacuum contact, proximity or soft contact alignment modes. 365 to 400nm spectral range at up to 350W. High precision X,Y, Theta alignment stage. Normal field microscope. Wafer size from small pieces to 3” dia. 110V, 60 Hz. Ask sales person for available chucks and mask holders.