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Equipment Details

Inventory Number: 56453
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Trion Technology

Trion Technology Minilock Single Wafer RIE Etcher. LCD display. Load lock with transfer arm. Current substrate carrier for up to 150mm wafers. Five MFC for gas input. Missing RF generator and vacuum pump. Sold As Is.

Now (USD): $2,999.00

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Used March Instruments PX 1000E8

Inventory Number: 58786
Now (USD): $21,500.00

March Instruments PX 1000E8 Plasma Asher/Etcher with Pneumatic Vertical Door. Batch system for plasma cleaning or etching. Currently configured with vertical shelves: 18 in. x 6 in. RFX 600 13.56 MHz RF generator. Two gas inputs. Does not include vacuum pump at this price, additional cost depending on type required. Shelves are mounted vertically from top to bottom. Not standard horizontal mounting.

Product Details

Used Anatech SP100

Inventory Number: 62871
Now (USD): $9,500.00

Anatech SP100 Table Top Plasma System. For plasma cleaning of small parts or for modifying surfaces. Digital countdown timer. Analog pressure display. Gas flow with needle valve control. RF Power Source: 100W at 13.56 MHz. Quartz Chamber: 4 in. x 8 in. Includes vacuum pump. 110V, 60 Hz, 10A.

Product Details

Used Anatech SCE104 MR 02

Inventory Number: 64392
Now (USD): $8,500.00

Anatech SCE104 MR02 Quartz Barrel Plasma System. Siemens S7-200 series PLC controlled auto sequencing Touch-Panel interface with graphical user interface. Quartz barrel chamber 4" diameter by 8" deep. Seren R301 13.56 Mhz RF generator. Gas flow control needle valve. 115V, 50/60Hz, 20A

Product Details