Equipment Photos

Equipment Details

Inventory Number: 60896
Category: PECVD - Oxidation
Manufacturer: Dockweiler Chemicals

Stainless Steel Bubbler Heat Exchanger.

Now (USD): $950.00

Products Similar to: Dockweiler Chemicals Heatexchanger 8000

Used Aviza Process Module

Inventory Number: 55576
Now (USD): $10,000.00

Oxide Process Module for Nano-ALD System. Process module only, no pumps. 300mm. Sold not tested with 30 day right to return.

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Used Aviza AL203

Inventory Number: 55593
Now (USD): $10,000.00

Process Module for Nano-ALD System. Process module only, no pumps. 300mm. Sold not tested with 30 day right to return.

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Used Plasmatherm Unaxis 790

Inventory Number: 58884
Now (USD): $120,000.00

ICP Plasma Etch System. Inductively coupled plasma etching system for high etch rates and control over selectivity and damage. PC controller with graphical user interface. 9.5 in. bottom electrode, ceramic clamp currently for 2 in. wafer. Chamber pumped via turbo pump with rough pump. RF Generators: RFPP5S 500W, 13.56 MHz and RFPP10M 1000W, 2 MHz. Six MFC mass flow gas controllers. Previous Gases used: CL2, SF6, N2, CF4, AR, BCL3.

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Used Oxford Instruments Plasmalab 800 Plus PECVD

Inventory Number: 60810
Now (USD): $99,000.00

Large Capacity Open Loaded Plasma Enhanced Chemical Vapor Deposition System. A 460mm diameter electrode offers a capacity of up to twelve 4 in. wafers. Ideally suited for batch PECVD processing where excellent across chamber uniformity of less than 2 percent is achieved for silicon nitride and silicon dioxide layers. Last owner had set up for 2 in. wafers. 18.75 in. top electrode with shower head gas input. Footprint is kept to a minimum by locating all electronics and vacuum components within the body of the tool, mass flow controllers are housed separately in a wall mounted gas pod. Six MFC gas controllers, previously used gases He, N2, N2O, NH3, SIH4/N2, CF4. PC controller provides intuitive user interaction with the system via advanced graphics and process recipe pages. Includes vacuum pump and blower package. Mfg. 2009, nice condition.

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Used Dockweiler Chemicals Heatexchanger 20000

Inventory Number: 60895
Now (USD): $950.00

Stainless Steel Bubbler Heatexchanger.

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Used Schumacher VMFC

Inventory Number: 62426
Now (USD): $2,500.00

Vapor Mass Flow Controller. Part No.: 1483-2201B. System used on CVD system bubblers.

Product Details

Used Schumacher VMDTEOS 3-6

Inventory Number: 62468
Now (USD): $2,500.00

Vapor Mass Flow Controller for TEOS Bubbler. Contains MFC, system microprocessor and control electronics. 90-250V, 50/60 Hz, 10/5A, CE.

Product Details

Used Schumacher VMFC

Inventory Number: 62469
Now (USD): $2,500.00

Vapor Mass Flow Controller for TEOS Bubbler. Contains MFC, system microprocessor and control electronics. 90-250V, 50/60 Hz, 10/5A, CE.

Product Details

Used Plasmatherm SLR

Inventory Number: 62604
Now (USD): $59,000.00

PECVD Plasma Enhanced Chemical Vapor Deposition System. Load locked parallel plate PECVD system. Windows graphical user interface provides an easy and familiar environment for machine operation and control. The top electrode is RF powered and the substrate is temperature controlled. Gas box is configured with eight gas input lines controlled by MFC. Previously used the following gases: CF4, SF6, AR, HE, NH3, Silane, N2O, SiN, N2. Includes Neslab chiller, roughing pump and power box.

Product Details

Used Dockweiler Chemicals Heatexchanger 20000

Inventory Number: 60895
Now (USD): $950.00

Stainless Steel Bubbler Heatexchanger.

Product Details