Inventory Number: |
64718 |
Category: |
Sputtering Systems |
Manufacturer: |
Denton Vacuum |
Denton Vacuum Explorer 14 Three Target RF/DC Sputtering System. Includes etch. Vacuum deposition system designed for thin film research applications. Graphic user interface and touch screen control. The system is fully automatic or can be run manually. Features a box coater design that provides easy access to substrates, sources, and instrumentation while maintaining excellent pumping characteristics. System utilizes a turbomolecular high vacuum pump with roughing pump. Three DC/RF magnetron cathodes each with a shutter. Variable source to substrate distance. Cathodes are mounted confocally for sputter down. Cathode size is approximately 3” dia. Substrate holder 6” dia. Unit is configured with substrate heater. Single MFC gas input. Deposition chamber 14” H x 14” W x 14” D stainless construction. 208V, 50/60Hz, 100A
Retail (USD): $59,500.00
Now (USD): $59,500.00