Equipment Photos

Equipment Details

Inventory Number: 61455
Category: Sputtering Systems
Manufacturer: Denton Vacuum

DC Sputtering System. Chamber: 12 in. dia. x 18 in. H glass Pyrex bell jar with guard. 15-inch dia. baseplate/pumping plenum assembly supported by system cabinet. System mounted on casters. Pumping System: Turbomolecular pump, LN2 trap located beneath high vacuum poppet valve and manual fill via external funnel. Alcatel 2010 two stage, rotary vane pump. Sputter Source: (1) DSM-300A cold sputter module. 300W DC power supply, 4-inch dia. magnetron sputter source with Denton Vacuum patented ANODE GRID® for maximum electron capture and minimal specimen heating. Variable source to substrate distance. Substrate Fixturing: 8.0 in. Omni rotating fixture plate, speed adjusts via input to system touch screen. Air operated shutter. Control System: The Explorer 14 system is semiautomatic and is controlled by a DL205 CPU from Automationdirect. The operator interface is a touch panel with graphical interface to the PLC. Graphical interface is supported with Automationdirect software. Manual operation of valves, pumps, low voltage sources and fixture rotation subsystems is through this graphical interface. Semiautomatic processes are also operated through this interface.

Now (USD): $21,500.00

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(1) Micrometer gas-bleed valve to introduce process gas into the deposition chamber.
(1) Gas isolation (toggle) valve for process gas control.

Sputter Source:
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I. RF/DC capability, only DC installed.
II. Variable source to substrate distance.
III. Clamp/bond target compatibility.
(2) Independent, electro-pneumatic source shutters (cylinder mounted air flowrate control) interfaced to system PLC for remote open/close operation.

Sputter Power Supply:
Sorensen DCS Series power supply (1.0 kW, 600 VDC). DC switch to shunt the output of the Sorensen DCS power supply to any of the (2) installed cathodes. Substrate Stage: 6.0 inch omni rotating fixture plate (sputter-down configuration). Speed adjust via input to system touch screen.

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