Equipment Photos

Equipment Details

Inventory Number: 60656
Category: Evaporators
Manufacturer: Innotec Group

Box Coater EBeam Vacuum Evaporation System. 304 stainless steel water cooled box chamber with Inside Dimensions of 27 in. L x 28 in. W x 39-3/4 in. H. Six pocket E-Gun with Innotec power supply and controls. Planetary style rotating substrate holders currently configured for 4 in. squares, see photos on fixturing. Quartz substrate heaters with digital setpoint controller. Air operated and electrically controlled automatic valve sequencing interlocked with system controller. Crystal deposition rate monitor. PC controller. CTI On-Board 8 cryopump with compressor and roughing pump. As Is Untested Price: $39,000. Fully Tested Price: $79,000.

Now (USD): $79,000.00

Products Similar to: Innotec Group ES-26CB

Used Unaxis BAK EVO (760)

Inventory Number: 47000
Now (USD): $85,000.00

Multiple Source Thermal Evaporator. Used thin film deposition system. Proven modular design box coater system can be easily configured for many applications. Currently configured with 3 shutters and 8 water cooled power feed throughs. 3 Inficon XTC crystal deposition monitors each controlled via Khan computer. Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics. Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built in failure diagnostics. CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down. Mfg. 2001. Very low hours. Sold As Is.

Product Details

Used Temescal FC-1800

Inventory Number: 53808
Now (USD): $69,000.00

Load-Locked Electron Beam Evaporator with Substrate Heaters. Used thin film deposition system. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump. 4 pocket gun with Temescal CV-8 power supply. Inficon IC4 Desposition monitor. Bell Jar: 19-1/2 in. ID. Single substrate dome 17 in. dia. with rotation control. Includes substrate heaters. Auto valve sequencer.

Product Details

Used Temescal BJD-1800

Inventory Number: 55181
Now (USD): $49,000.00

Electron Beam Evaporator. Used thin film deposition system. Maxtek crystal deposition rate monitor. Four pocket E-Gun. CV-14 E Beam power supply with sweep controls. Vacuum gauges. CTI cryopump with compressor and roughing pump. Does not have substrate heaters.

Product Details

Used CHA SEC-1000-RAP

Inventory Number: 55643
Now (USD): $55,000.00

Dual Gun E Beam Evaporator. Used thin film deposition system. Two single pocket e-guns with individual power and sweep control. Inficon IC4 Plus deposition rate monitor. Temescal CV-8 E beam power supply. Auto-Tech II valve controller.  25.5 in. diameter water cooled stainless steel bell jar. CTI cryopump with compressor and roughing pump. Does not have substrate fixturing currently.

Product Details

Used Temescal BJD-1800

Inventory Number: 55702
Now (USD): $49,000.00

4 Pocket E-Beam Evaporator Upgraded by TES. Used thin film deposition system. Inficon XTC/2 crystal deposition monitor/controller. Three dome planetary configuration for 3 in. wafers. Rotation control. All system components mounted in cabinet except cryo compressor. CTI cryopump compressor with roughing pump. Auto valve controller. 4 pocket e-gun with turret source selector. Niles Electronics NE-6 E-Beam power supply. X-Y sweep controller. Water cooled 17.5 in. ID bell jar.

Product Details

Used CHA SE-1000-RAP

Inventory Number: 56323
Now (USD): $55,000.00

Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump with roughing pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.

Product Details

Used CHA Bell Jar

Inventory Number: 57144
Now (USD): $950.00

Stainless steel. 25.75 in. OD, 29 in. tall.

Product Details

Used CHA SE-1000

Inventory Number: 57367
Now (USD): $55,000.00

E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

Product Details

Used Temescal VES-2550

Inventory Number: 57476
Now (USD): $65,000.00

E-Beam Evaporation System with Two Four Pocket E-Guns. Used thin film deposition system dual egun evaporator. Inficon IC4 crystal deposition monitor. Two four pocket electron guns with rotation controller. Temescal CV-8 E-Beam power supply. Currently configured with single fixed dome for 3 in. substrates (see photo). Water cooled 25 in. ID chamber. Automatic or manual valve control. CTI cryopump with compressor and roughing pump.

Product Details

Used CHA SE-600-RAP

Inventory Number: 57536
Now (USD): $45,000.00

Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump and roughing pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

Product Details