Used Ebara 50X20

Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Sold fully tested and in good working condition. Not rebuilt at this price.

Large 400 L/S Triode Vac Ion Pump and Magnet. Pumping speed: 400 l/sec.208/240VAC, 15A., 50/60 Hz. With controller Model 921-0066. $7,000 REBUILT. $3,750 AS IS.

Mechanical Dry Pump Package. Pumping Speed: 297 cfm. Ultimate Pressure: 3x10^-3 torr. Requires cooling water. 208V, 3 Phase, 60 Hz.

Dry Vacuum Pump. Rebuilt.

Older system, fair condition. Top Flange: 14-5/8 in. O.D., 11-5/8 in. I.D., 32 holes 13-5/8 in. on center. Bottom Flange: 7-13/16 in. O.D., 5-15/16 in. I.D., 20 holes 7-1/8 in. on center.

Cryo Compressor. 460V, 3 Ph, 60 Hz.

Turbopump Controller. Controller only, no cables.  6 Available.

Cryo Compressor. Water cooled. 480V, 3 Ph, 60 Hz.

Cryopump. 8 in. conflat flange. Cryo pump only, no compressor or cables. Pumping speed for air: 1000 l/s, water: 3600 l/s. Sold tested in good working condition, not rebuilt at this price.

Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Sold fully tested and in good working condition. Not rebuilt at this price.