Used Ebara 50X20

Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Sold fully tested and in good working condition. Not rebuilt at this price.

Mechanical Dry Pump Package. Pumping Speed: 297 cfm. Ultimate Pressure: 3x10^-3 torr. Requires cooling water. 208V, 3 Phase, 60 Hz.

Older system, fair condition. Top Flange: 14-5/8 in. O.D., 11-5/8 in. I.D., 32 holes 13-5/8 in. on center. Bottom Flange: 7-13/16 in. O.D., 5-15/16 in. I.D., 20 holes 7-1/8 in. on center.

Cryo Compressor. 460V, 3 Ph, 60 Hz.

Turbopump Controller. Controller only, no cables.  6 Available.

Cryo Compressor. Water cooled. 480V, 3 Ph, 60 Hz.

Cryopump. 10” OD conflat flange. Needs rebuild.

Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Sold fully tested and in good working condition. Not rebuilt at this price.

Dry Pump Package. Displacement: 221 FT3/min. 208/460V, 3 Ph, 60 Hz. Not Rebuilt. Sold As Is.

Magnetic Suspension Turbopump. Pump only, can't be tested, no controller or cables. 4 in. ID O-Ring groove flange. Pumping Speed: 300 l/s. Sold As Is.