Used Edwards E306A

Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryopumped high vacuum system. Four pocket gun with Temescal Simba power supply. Bell Jar: 19½” I.D. Single substrate dome 17” dia. with rotation control. Includes substrate heaters. Auto valve sequencer. Needs hinge repaired.

CHA Bell Jar. Stainless steel. 25.75 in. OD, 29 in. tall.

CHA SE-1000 E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Temescal BJD-1800 E-Beam Vacuum Deposition Evaporator. Low profile vacuum deposition system has the substrate holder waist height for easy access. Four pocket E-Gun with Temescal Simba 2 power supply. Quartz substrate heaters with digital temperature control. Inficon IC5 crystal deposition rate controller. Automatic and manual vacuum control capability. CTI 8 cryopump with compressor but unit does not come with a roughing pump. Sold As Is. System can be sold fully tested with warranty for an additional cost. 

Miscellaneous Deposition Source. Effusion Cell with Power Supply. Item has shutter and deposition source. Power supply with temperature controller. 4.5 in. OD conflat flange. 120V, 50/60 Hz, CE.

Createc CLC-40-10-180-WK-SH Effusion Deposition Source. 2.75 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with shutter. 4.5 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with 4.5 in. OD conflat flange.