Used Denton Vacuum DV502A

Denton DV502A Cryo Integrity 14 Thin Film Deposition System. Dual source thermal evaporator with Inficon crystal deposition rate monitor. Directional shutter allows user to adjust source power while monitoring deposition rate before exposing substrates. Single dome rotating substrate holder with variable speed control. Optional 2KVA evaporation transformer installed for increased deposition power. Automatic or manual vacuum pump down control. High vacuum pumping upgraded to high speed CTI 8 Cryopump. Stainless steel vacuum chamber with inside dimensions of 13"L x 14.5"D x 18"H. Includes one set of chamber shielding.

CHA Bell Jar. Stainless steel. 25.75 in. OD, 29 in. tall.

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Miscellaneous Deposition Source. Effusion Cell with Power Supply. Item has shutter and deposition source. Power supply with temperature controller. 4.5 in. OD conflat flange. 120V, 50/60 Hz, CE.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with shutter. 4.5 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with 4.5 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with 4.5 in. OD conflat flange.

Edwards E306 Compact Thermal Deposition Evaporator. Laboratory size self-contained thermal evaporator. Quartz Chamber: 12” dia. Built in gauges and power supply. Single thermal source.

Edwards E306A Compact Thermal Evaporation Coating System. Laboratory size self-contained resistive thermal deposition coating system. 12-inch
diameter quartz bell jar with implosion guard. Built-in gauges and power supply. Diffusion and roughing pumps. Rotary tilting specimen holder with speed control. Water cooling required.