Used Denton Vacuum DV502A

Denton Vacuum DV-502A Turbo Dual Source Thermal Evaporator with Crystal Deposition Rate Monitor. Thermal-resistive source evaporator deposition system. Quartz crystal film thickness monitor for deposition rate monitoring. Two thermal wire basket type evaporation sources.  Stainless steel box type chamber with inside dimensions of 13” L x 14” W x 18” H. Turbo molecular high vacuum pump with roughing pump. Semiautomatic vacuum pump down controller. Can also be controlled in manual mode. 208V, 1Ph, 60Hz, 20A

Denton Vacuum DV-502A High Vacuum Thermal Evaporator Deposition System. Small laboratory sized thermal resistive evaporation system. Automatic pumpdown option, manual or auto operation of vacuum pumping and venting. 12” x 12” dia. quartz bell jar with implosion shield. Rotating sample holder for samples. Two resistive sources. Built-in vacuum gauges and power supplies. Diffusion and roughing pumps inside case.

Denton Vacuum DV-502A Dual Source High Vacuum Thermal Evaporator. Automatic pump down and vent controls. Quartz 12” dia. x 12” H bell jar with implosion guard. Two thermal boat type sources or two carbon rod sources can be installed at time of order. Diffusion pump with roughing pump. Manual evaporation control. Built in vacuum gauges. Motorized rotation fixture for SEM samples.

Denton DV502A Cryo Integrity 14 Thin Film Deposition System. Dual source thermal evaporator with Inficon crystal deposition rate monitor. Directional shutter allows user to adjust source power while monitoring deposition rate before exposing substrates. Single dome rotating substrate holder with variable speed control. Optional 2KVA evaporation transformer installed for increased deposition power. Automatic or manual vacuum pump down control. High vacuum pumping upgraded to high speed CTI 8 Cryopump. Stainless steel vacuum chamber with inside dimensions of 13"L x 14.5"D x 18"H. Includes one set of chamber shielding.

Denton DV502A Cryo Integrity 14 Thin Film Deposition System. Dual source thermal evaporator with Inficon crystal deposition rate monitor. Directional shutter allows user to adjust source power while monitoring deposition rate before exposing substrates. Single dome rotating substrate holder with variable speed control. Optional 2KVA evaporation transformer installed for increased deposition power. Automatic or manual vacuum pump down control. High vacuum pumping upgraded to high speed CTI 8 Cryopump. Stainless steel vacuum chamber with inside dimensions of 13"L x 14.5"D x 18"H. Includes one set of chamber shielding

Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryopumped high vacuum system. Four pocket gun with Temescal Simba power supply. Bell Jar: 19½” I.D. Single substrate dome 17” dia. with rotation control. Includes substrate heaters. Auto valve sequencer. Needs hinge repaired.

CHA Bell Jar. Stainless steel. 25.75 in. OD, 29 in. tall.

CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Temescal BJD-1800 E-Beam Vacuum Deposition Evaporator. Low profile vacuum deposition system has the substrate holder waist height for easy access. Four pocket E-Gun with Temescal Simba 2 power supply. Quartz substrate heaters with digital temperature control. Inficon IC5 crystal deposition rate controller. Automatic and manual vacuum control capability. CTI 8 cryopump with compressor but unit does not come with a roughing pump. Sold As Is. System can be sold fully tested with warranty for an additional cost.