Used Denton Vacuum DV 602

Gencoa Planar Magnetron Cathode. Target Area: 29-1/2 in. x 4-7/8 in. Gas input. With cart for maintenance of cathode.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

MRC 943 Load Locked RF and DC Sputtering System with Substrate Heat and RF Etch. Fully Loaded System in great shape! Just had full PM Service by factory trained engineer. Video of operation available. Currently set up with 2 Planer cathodes and 1 Inset cathode. Large 5” x 15” Cathodes. CRT screen process monitoring. Substrate Carrier: 13” x 13”. Advanced Energy MDX10K DC Magnetron power supply and Advanced Energy RFX II 3000 RF generator.  Here is a link to a quick demonstration:  

https://youtu.be/jU8bNcUt2rs

Denton Vacuum DV-502A Turbo Dual Source Thermal Evaporator with Crystal Deposition Rate Monitor. Thermal-resistive source evaporator deposition system. Quartz crystal film thickness monitor for deposition rate monitoring. Two thermal wire basket type evaporation sources.  Stainless steel box type chamber with inside dimensions of 13” L x 14” W x 18” H. Turbo molecular high vacuum pump with roughing pump. Semiautomatic vacuum pump down controller. Can also be controlled in manual mode. 208V, 1Ph, 60Hz, 20A

Denton Vacuum DV-502A High Vacuum Thermal Evaporator Deposition System. Small laboratory sized thermal resistive evaporation system. Automatic pumpdown option, manual or auto operation of vacuum pumping and venting. 12” x 12” dia. quartz bell jar with implosion shield. Rotating sample holder for samples. Two resistive sources. Built-in vacuum gauges and power supplies. Diffusion and roughing pumps inside case.

Denton Vacuum DV-502A Dual Source High Vacuum Thermal Evaporator. Automatic pump down and vent controls. Quartz 12” dia. x 12” H bell jar with implosion guard. Two thermal boat type sources or two carbon rod sources can be installed at time of order. Diffusion pump with roughing pump. Manual evaporation control. Built in vacuum gauges. 110V, 50/60Hz

Denton Vacuum DV-502A Dual Source High Vacuum Thermal Evaporator. Automatic pump down and vent controls. Quartz 12” dia. x 12” H bell jar with implosion guard. Two thermal boat type sources or two carbon rod sources can be installed at time of order. Diffusion pump with roughing pump. Manual evaporation control. Built in vacuum gauges. Motorized rotation fixture for SEM samples.

Denton DV502A Cryo Integrity 14 Thin Film Deposition System. Dual source thermal evaporator with Inficon crystal deposition rate monitor. Directional shutter allows user to adjust source power while monitoring deposition rate before exposing substrates. Single dome rotating substrate holder with variable speed control. Optional 2KVA evaporation transformer installed for increased deposition power. Automatic or manual vacuum pump down control. High vacuum pumping upgraded to high speed CTI 8 Cryopump. Stainless steel vacuum chamber with inside dimensions of 13"L x 14.5"D x 18"H. Includes one set of chamber shielding.

Denton DV502A Cryo Integrity 14 Thin Film Deposition System. Dual source thermal evaporator with Inficon crystal deposition rate monitor. Directional shutter allows user to adjust source power while monitoring deposition rate before exposing substrates. Single dome rotating substrate holder with variable speed control. Optional 2KVA evaporation transformer installed for increased deposition power. Automatic or manual vacuum pump down control. High vacuum pumping upgraded to high speed CTI 8 Cryopump. Stainless steel vacuum chamber with inside dimensions of 13"L x 14.5"D x 18"H. Includes one set of chamber shielding