Used MPF A0443-2

Miscellaneous Vacuum Flange. 12-inch OD flange. Top plate for a CVD system. Multiple gas feedthroughs on top and a screen baffle on the bottom of the plate.

Miscellaneous Vacuum Flange. Top plate for a CVD system. Multiple gas inputs on top of cover. 21 in. dia. stainless steel.

Unit Instruments 3165 Mass Flow Controller. N2 100 SCCM. NEVER USED.  5 Available.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLM. NEVER USED.

Sigma Instruments SID-142 Multi Channel Thin Film Deposition Controller. Controller only. PC based thin film controller.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLPM. Device net connector. CE.

Miscellaneous Insulating Flange. Non-conducting ring in between flanges. 9.25 in. OD, 6 in. ID, 8.25 in. hole center with o-ring groove. Second flange does not have o-ring groove.

Miscellaneous Water Cooled Baffle. Water cooled baffle for use in diffusion pumped vacuum system. 14.5 in. OD ISO flange. 3 Available.

Unit Instruments UCAL-1000 Mass Flow Transfer Calibrator. Used to test and calibrate mass flow controllers. Special adapters may be needed. Manual calibrator for ranges from 200 sccm to 30 slm. Requires transfer standard. 120V, 50/60 Hz.

Unit Instruments URS-10 MFC Power Supply and Readout. Designed to supply continuous power and selectable valve voltage to as many as ten unit mass flow meters, controllers or transfer standards. 120V, 60 Hz.