Inventory Number: |
62737 |
Category: |
Plasma Etchers - Ashers - Ion Mills |
Manufacturer: |
Oxford Instruments |
Oxford Instruments 90 Plus RIE Reactive Etcher with Loadlock. Small batch load-locked RIE with 275 mm electrode. Easy to use computer interface controls all system functions. 13.56 MHz RF generator, 600W. Gas box with four MFC. Previous gases used: Oxygen, Boron Trichloride, Chlorine and Nitrogen. SYSTEM SOLD AS IS WHERE IS, ONLY WHAT IS IN THE PHOTOS.
Retail (USD): $19,500.00
Now (USD): $19,500.00