Used Ebara 80X25

Balzers UC-010 875-TA Cryo Compressor. 460V, 3 Ph, 60 Hz.

Shimadzu E1-2003M1 Turbopump Controller. Controller only, no cables.  5 Available.

Balzers UC-010915 Cryo Compressor. Water cooled. 480V, 3 Ph, 60 Hz.

Ebara 50X20 Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A. Not rebuilt at this price.

Ebara 50X20 Dry Pump Package. Pumping Speed: 3,000 l/min. 208V, 3 Ph, 60 Hz, 18A.  Not rebuilt at this price.

Ebara A150W-M High Volume Vacuum Dry Pump Package. Control panel for monitoring condition. High reliability even for harsh processes. Pumping Speed: 18,000 l/min. Water cooled. Manifold coolers. Inlet Flange: 4 in. ISO. 200/220V, 3 Ph, 50/60 Hz, 36.1A, CE.  Does not come with power cord or water lines.

Varian VHS-4 High Speed Diffusion Pump. Pumping Speed: 1200 l/s. Inlet Flange: 9 in. OD, 5.9 in. ID. Water cooled. 240V, 1 Ph, 60 Hz.

Varian VHS-4 High Speed Diffusion Pump. Flange: 5.75 in. ID, 9 in. OD, 7.5 in. hole circle, ASA type. Pumping Speed: 1200 l/s. 240V, 1 Ph, 60 Hz.

Osaka Vacuum TG-1810 Turbo Pump. Pump only, no controller. Volume Flow Rate: 1800 l/s. 10 in. ID ISO flange.

Edwards DP40 Oil Free Vacuum Pump. Tested and makes good base pressure. Not rebuilt at this price. Displacement: 62 m^3/hr. 208/230/460V, 3 Ph, 60 Hz.