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Equipment Details

Inventory Number: 64660
Category: Vacuum Parts & Controls
Manufacturer: Granville Phillips

Granville Phillips 390 Series Micro ATM Module Gauge, 2.75 in. 2 Setpoints CF, Digital Display, Dual Yttria-coated Iridium ion gauge filaments, Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. PN: 390802-2-YG-T. The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

Now (USD): $1,500.00

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