Used Granville Phillips 390802-2-YG-T

Granville Phillips 390 Series Micro ATM Module Gauge, 2.75 in. 2 Setpoints CF, Digital Display, Dual Yttria-coated Iridium ion gauge filaments,
Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. PN: 390802-2-YG-T. The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

Miscellaneous Vacuum Flange. 12-inch OD flange. Top plate for a CVD system. Multiple gas feedthroughs on top and a screen baffle on the bottom of the plate.

Unit Instruments 3165 Mass Flow Controller. N2 100 SCCM. NEVER USED.  5 Available.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLM. NEVER USED.

Sigma Instruments SID-142 Multi Channel Thin Film Deposition Controller. Controller only. PC based thin film controller.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLPM. Device net connector. CE.

Miscellaneous Insulating Flange. Non-conducting ring in between flanges. 9.25 in. OD, 6 in. ID, 8.25 in. hole center with o-ring groove. Second flange does not have o-ring groove.

Miscellaneous Water Cooled Baffle. Water cooled baffle for use in diffusion pumped vacuum system. 14.5 in. OD ISO flange. 3 Available.

Unit Instruments UCAL-1000 Mass Flow Transfer Calibrator. Used to test and calibrate mass flow controllers. Special adapters may be needed. Manual calibrator for ranges from 200 sccm to 30 slm. Requires transfer standard. 120V, 50/60 Hz.

Unit Instruments URS-10 MFC Power Supply and Readout. Designed to supply continuous power and selectable valve voltage to as many as ten unit mass flow meters, controllers or transfer standards. 120V, 60 Hz.