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Used Yield YES 310D

Inventory Number: 64588
Now (USD): $15,000.00

YIELD YES 310 Dual Function Image Reversal or HMDS Vapor Prime Oven. Capacity for HMDS Prime: 8 cassettes of 4” wafers, or 1 cassette of 5-8” wafers. Capacity for Image Reversal: 4 cassettes of 4” wafers, or 1 cassette of 5-8” wafers. Cleanliness: <10x1 micron particles per 4” wafer. Throughput for HMDS Prime: 2 full loads/hr. Throughput for Image Reversal: (2) ½ loads/hr. Temperature: 250°C maximum. Does not include a vacuum pump at this price.

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