Equipment Photos

Equipment Details

Inventory Number: 47000
Category: Evaporators
Manufacturer: Unaxis

Multiple Source Thermal Evaporator. Used thin film deposition system. Proven modular design box coater system can be easily configured for many applications. Currently configured with 3 shutters and 8 water cooled power feed throughs. 3 Inficon XTC crystal deposition monitors each controlled via Khan computer. Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics. Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built in failure diagnostics. CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down. Mfg. 2001. Very low hours.

Now (USD): $165,000.00

Products Similar to: Unaxis BAK EVO (760)

Used IVI Corp. Box Coater

Inventory Number: 43794
Now (USD): $21,000.00

48 in. Thermal Evaporator. Used thin film deposition system. PC Controller. Sycon STC-200 Deposition Controller. Inside Pill Shape Dimensions: 48 in. L x 48 in. W x 48 in. H. Baseplate has 23 - 1 in. feedthroughs, 5 - 1-1/4 in. feedthroughs and 1 - 8 in. port. 6 - 2-1/2 in. ports. 13-1/2 in. port where motor drive comes into top of chamber. IVI 8930 Model 2205 Resistance Power Supply. Cryopump missing compressor and rough pump. 208V, 3 Ph, 60 Hz. Sold As Is.

Product Details

Used Temescal FC-1800

Inventory Number: 53808
Now (USD): $69,000.00

Load-Locked Electron Beam Evaporator with Substrate Heaters. Used thin film deposition system. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryo pumped high vacuum system with roughing pump. 4 pocket gun with Temescal CV-8 power supply. Inficon IC4 Desposition monitor. Bell Jar: 19-1/2 in. ID. Single substrate dome 17 in. dia. with rotation control. Includes substrate heaters. Auto valve sequencer.

Product Details

Used Temescal BJD-1800

Inventory Number: 55181
Now (USD): $59,000.00

Electron Beam Evaporator. Used thin film deposition system. Maxtek crystal deposition rate monitor. Four pocket E-Gun. CV-14 E Beam power supply with sweep controls. Vacuum gauges. CTI cryopump with compressor and roughing pump. Does not have substrate heaters.

Product Details

Used CHA SEC-1000-RAP

Inventory Number: 55643
Now (USD): $55,000.00

Dual Gun E Beam Evaporator. Used thin film deposition system. Two single pocket e-guns with individual power and sweep control. Inficon IC4 Plus deposition rate monitor. Temescal CV-8 E beam power supply. Auto-Tech II valve controller.  25.5 in. diameter water cooled stainless steel bell jar. CTI cryopump with compressor and roughing pump. Does not have substrate fixturing currently.

Product Details

Used Temescal BJD-1800

Inventory Number: 55702
Now (USD): $49,000.00

4 Pocket E-Beam Evaporator Upgraded by TES. Used thin film deposition system. Inficon XTC/2 crystal deposition monitor/controller. Three dome planetary configuration for 3 in. wafers. Rotation control. All system components mounted in cabinet except cryo compressor. CTI cryopump compressor with roughing pump. Auto valve controller. 4 pocket e-gun with turret source selector. Niles Electronics NE-6 E-Beam power supply. X-Y sweep controller. Water cooled 17.5 in. ID bell jar.

Product Details

Used CHA SEC-600-RAP

Inventory Number: 56242
Now (USD): $55,000.00

E-Beam Evaporator. Used thin film deposition system. High vacuum electron beam deposition system. 19 in. dia. water cooled bell jar. 6 pocket e-gun with SR-10 power supply and sweep controls. Inficon IC/4 crystal deposition monitor. CTI on board cryopump with compressor and roughing pump. Auto-Tech II vacuum controller. Fixture rotation controller and motor but does not include substrate fixturing. Heater power supply but no heaters currently installed.

Product Details

Used CHA SE-1000-RAP

Inventory Number: 56323
Now (USD): $55,000.00

Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump with roughing pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.

Product Details

Used Temescal BJD-1800

Inventory Number: 57141
Now (USD): $59,000.00

E-Beam Vacuum Deposition System. Used thin film deposition system. Bell jar style E-Beam evaporator. 6 pocket e-gun with source selector. Temescal Simba E-Beam power supply with power and sweep controls. Inficon IC6000 crystal deposition rate monitor (can be upgraded to newer model at additional cost). Quartz lamp substrate heaters. Single lift off dome with rotation control. CTI-8 cryopump with compressor and roughing pump. 208V, 3 Ph, 60 Hz.

Product Details

Used CHA Bell Jar

Inventory Number: 57144
Now (USD): $950.00

Stainless steel. 25.75 in. OD, 29 in. tall.

Product Details

Used CHA SE-1000

Inventory Number: 57367
Now (USD): $55,000.00

E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

Product Details