Equipment Photos

FLX 5200h

Equipment Details

Inventory Number: 48127
Category: Wafer Analysis
Manufacturer: Tencor
THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR TENCOR SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Automated Thin Film Stress Measurement System. Features patented dual wavelength technology which allows production monitoring of critical reliability problems caused by metal and dielectric film cracking, voiding,lifting and hillock formation. Data analysis features wafer topography measurement along diameter, trend plotting, calculation of water diffusion coefficient,automatic recalculation of stress when film or substrate thickness is corrected, and linear regression and calculation of stress-time gradients.
Now (USD): Contact for Price

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