Equipment Photos

Equipment Details

Inventory Number: 36279
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Tegal

Inline Automatic Plasma Etcher. The Plasma Inline 803 is a fully automatic, microprocessor-based plasma chemistry etcher designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers. It provides up to four process gases, two process channels and a clean channel. Sold As Is. Does not come with monitor or RF generator.

Now (USD): $750.00

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