Equipment Photos

Equipment Details

Inventory Number: 36278
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Tegal

Inline Plasma Etcher. Fully automatic, microprocessor-based, plasma chemistry etcher designed especially for the etching of thin films deposited on semiconductor wafers. All gas flow rates controlled by mass flow controllers. Sold As Is. Does not come with monitor or RF generator.

Now (USD): $750.00

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Product Details