||Developers - Wet Process
Spray Acid Tool. Previously used with BOE/Glycol. Configured for 5 in. and 6 in. wafers, wafer size can be changed by replacing rotors. Four heated tanks and bulk fill capability. DI water and N2 for cleaning. Graphical display with membrane data entry keypad, 3-1/2 in. floppy drive, multi-recipe. Sold As Is.