Equipment Photos

Equipment Details

Inventory Number: 58989
Category: Plasma Etchers - Ashers - Ion Mills
Manufacturer: Oxford Instruments

Reactive Ion Etching System with Load Lock. New PC controller with Windows® 7 operating system. 8-inch diameter electrode. Shower head gas input. 13.56 Hz RF generator, 600W. Turbo pumped process chamber. Robot arm transfers one substrate at a time into process chamber. Five MFC gas inputs.

Now (USD): $75,000.00