High Speed Particle Detection System for Bare Wafer or Patterned Wafer Inspection. Inspects device wafers after processing is completed or inspects blanket films. Blanket films can be inspected at over 60 wafers per hour and patterned wafers at over 45 wph. .1 micrometer particle detection on unpatterned silicon. Windows NT operating system. Currently configured for 200mm wafers but can be configured for 300mm. Date of Mfg. 2003. Sold As Is with 30 day right of return.