E-Beam Evaporator. Used thin film deposition system. High vacuum electron beam deposition system. 19 in. dia. water cooled bell jar. 6 pocket e-gun with SR-10 power supply and sweep controls. Inficon IC/4 crystal deposition monitor. CTI on board cryopump with compressor and roughing pump. Auto-Tech II vacuum controller. Fixture rotation controller and motor but does not include substrate fixturing. Heater power supply but no heaters currently installed.