Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump and roughing pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.